Possible Health Hazards Associated with the Use of Toxic Metals in Semiconductor Industries
From Cutting Edge
This article discusses the toxic effects of inhalation of gallium arsenide, indium arsenide and indium phosphide dusts. Exposure to these semiconductor compounds in the microelectronic industry can occur during the preparation of materials, cleaning and maintenance operations. The article discusses the limited findings about routes of exposure and effects on biological systems including pulmonary, reproductive, immunological, hepatic, renal, circulatory, and central nervous system effects. The article also outlines directions for future research.
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Adobe Acrobat reader
Cost / Copyright:
Copyright Japan Society for Occupational Health
DLESE Catalog ID: SERC-NAGT-000-000-000-582
This resource is part of 'Geology and Human Health'
Resource contact / Creator / Publisher:
Author: Swaran J.S. Flora
Defence Research and Development Establishment of India, Division of Pharmacology and Toxicology
Publisher: Journal of Occupational Health